Optimal etchants for etching single-layer Ag alloy films, including single-layer Ag films and APC (Ag-Pd-Cu alloy), as well as stacked Ag/transparent conductive films.
Stacked film etchants are available in two types: selective etching that removes only Ag, and simultaneous etching of both Ag and the transparent conductive film in a single process.

Keywords: wet etching, silver, APC

Features

• Stable etching rate
• Small side etching amount and fine pattern forming
• Optimized etching rate and excellent uniformity