Excellent etching on single-layer Al and Al alloy films and Mo and Mo alloy films,
as well as on stacked Mo/Al/Mo, Mo alloy, Al alloy, and Mo alloy films.

Keywords: wet etching, molybdenum

Features

• Excellent etching on molybdenum and molybdenum alloy films
• Forming excellent forward taper
• Small side etching amount and fine pattern forming
• Optimized etching rate and excellent uniformity