Excellent anisotropic etching on Si films without corrosion of Al or Al alloy films.
By suppressing micro-pyramid formation, etching with a flat bottom is possible.

Keywords: wet etching, silicon anisotropic etching

Features

• Less chemical damage on Al and Al alloy film
• Excellent flat surface after etching
• Applicable regardless of device etching area
• Long Bath Life
• Pure Etch ZE series (Insulating Film Etchant with Significantly Reduced Al Damage) recommended as a pretreatment