Excellent roughening etching of the surfaces of AlGaAs films, GaAs films, and GaAs substrates, improving their light-extraction efficiency

Keywords: frost etching, asperity, LED, light-emitting diode, aluminum gallium arsenide, gallium arsenide

Features

• Forming desirable asperity, improving the light extraction efficiency
• Processing at low temperature in a short time
• Excellent uniformity of asperity profile